Precision calibration plateCalibration of 3D vision measuring machines

Calibration plates for measuring machines

KLA Tencor

KLA Tencor was searching for a partner for the development of a new reference component. This component is used for calibrating 3D vision measuring machines which are operational in the IC industry.

 

Multiple production process

The component looks quite simple, but the production involves different processes. Micro laser cutting, CNC-technology and engineering were necessary to design and develop the calibration component. The tiny balls are accurately positioned so they form a certain reference pattern. After being produced, all components are measured and calibrated with a vision system.
An innovative and non-conventional approach led to an in-house developed product that met with the requirements of KLA Tencor. After the development of the first reference component, more types were developed.